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Products list of sputtering targets

Category Composition Application
OLED Ag, Ag alloy Reflective electrode
WOx series, MoOx series Hole injection layer
LCD-Touch Panel In2O3-X Anti-static film
AZO-lown Gas barrier film
Semiconductor Al, Al alloy, Cu, Ni, Au, Ti Electrodes, Wiring material
GeSbTe-X, Si Memory
TiW Diffusion barrier
Au, Ag alloy, Ni Si wafer backside coating
Si Mask
LED TiW, Ag, Al, ZnO-X Diffusion barrier, etc.
WOx series, MoOx series Hole injection layer
Ag, Ag alloy Reflective layer
AZO-lown Gas barrier layer
Photovoltaic Cu, CuGa Absorption layer
ZnO-X Transparent conductive layer
Others SIALON, SiC Themal head hard coating
Si, Nb, Nb2O5 Anti-reflection

Cylindrical type is available in partial composition.

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