Rectangle Silicon Panel「KAKUGATA™」
We manufacture "KAKUGATA™," a rectangular silicon panel with sides of up to 600 mm, representing a world-leading size.
In addition to the high rigidity and high thermal conductivity of silicon, our proprietary large-scale silicon ingot casting and processing technologies enable exceptional flatness and low surface roughness. This product is expected to be used in wide-ranging applications in advanced 2.xD packaging used in rapidly growing fields such as generative AI, including as a carrier substrate for redistribution layer (RDL) formation and as core and silicon interposer materials.
Feature
- Ultra-low surface roughness
- TTV uniformity even though large-area panel (＜10 μm at 600 mm × 600 mm)
- High rigidity and thermal conductivity
- High-purity silicon material with extremely low inclusion content, proven in semiconductor front-end processes
Lineup
| Size ※1 | Material | TTV ※2 | Surface roughness ※2 | ||
|---|---|---|---|---|---|
| XY | Z | Sa | Sz | ||
| 310 × 310mm | 0.8mmt | Columnar Crystal Silicon |
< 5 µm | < 2.0 µm | < 50 µm |
| 510 × 515mm | 0.8mmt | < 10 µm | |||
| 600 × 600mm | 0.8mmt | < 10 µm | |||
- ※1：please do not hesitate to contact us through our inquiry form for sizes other than those listed above.
- ※2：All property values are typical values and are not guaranteed specifications.
Application
