Mitsubishi Materials Corporation

Coating Diffusion Sources
for Semiconductors

Coating Diffusion Sources for Semiconductors

Electronic Materials & Components


This product is chlorine-free, therefore, there is no need to maintain spin coaters and other equipment due to corrosion.

Application Examples

N-type doping materials for silicon semiconductors (bipolar IC, Bi-CMOS, etc.)

[Sb coating diffusion]


Advanced Products Company Electronic Materials & Components Div. Sales Dept. Chemicals Group


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Related Websites

Mitsubishi Materials Electronic Chemicals Co., Ltd.

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