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Sol-Gel liquid which enables to form dielectric thin film easily.
You can easily form ferroelectric thin films like PZT,SBT,BLT which have uniform composition and thickness, and Oxide thin films like LSCO, applying and heat-treating this solution using metal alkoxide on each substrates by spin-coating method. |
| Sol-Gel Solution for FeRAM You can get More Uniform and Thinner Films by Lower Annealing Temperature |
1. Surface morphologies of PZT films • You can prepare film with excellent uniformity without using a seeding layer. |
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2. Properties of PZT thin films  • Films with good saturation characteristics
• Film thickness down to 90nm without degradation of properties • Low drive voltage |
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| 3. Low temperature preparation of PZT films (450  ) • You can get films with 2Pr > 20. |
4. Low temperature preparation of SBT films (650) * Optimized 650 is Symetrix's proprietary process• You can easily prepare SBT films by Modified Sol-Gel Solution using low temperature annealing |
PZT SOLGEL SOLUTION for Over-1- m-THICK FILMSYou can get PZT films up to 1 m thick per one coating!! |
1. Preparation of films |
2. Uniformity of film thickness • You can get film with excellent uniformity of thickness |
3. Microstructures of single-coated films • Choose the thickness you hope for your application. |
4. Microstructures of multicoated films |
5. Polarization and longitudinal strain hysteresis loops for multicoated films • Good properties on each film
• Choose the thickness you hope for your application. |
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6. Densification of PZT thick film • You can easily get dense film by densification. • The film is expected for low leakage current density. |
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Others
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