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AZO type sputtering target for TCO

TCO film as alternatives to ITO

AZO (Al2O3-ZnO) target is able to form TCO (Transparent Conductive Oxide) film which is a transparent film with high conductivity.
AZO has been drawing more attention lately as an alternative to ITO (In2O3-SnO2) while ITO is much more expensive and grows more concerns about its bad influence on human bodies.

Advantages of AZO target from Mitsubishi Materials

  • Reliable discharge property achieved by uniformed micro structure and high density.

Mitsubishi Materials will propose best compositions for our customers based upon their needs. For example, our material for unique composition with controlled band gap can raise conversion efficiency as a transparent film for solar cell. Not only that, our AZO target has higher transparency in a visible ray area compared to traditional AZO target, therefore, it can be used for applications that require high transparency.

Mitsubishi Materials has earned high trust from our customers by providing AZO targets with a variety of features. Please contact us if you are in need for new materials for TCO.

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