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B doped Si sputtering target

Takes an advantage of own unique technology

Mitsubishi Materials and group companies have been manufacturing high purity polycrystalline silicon with the highest level in the world and also producing silicon wafers for many years.
We manufacture and supplies a variety of silicon targets in order to accommodate many applications by utilizing the technology of our group companies.

Advantages of silicon targets from Mitsubishi Materials

  • Choice from single crystal silicon, columnar silicon and polycrystalline silicon
  • Provide low resistance type with DC sputtering capability
  • Prevent cracks while sputtering
  • Available up to 500mm diameter
  • Planer type and cylindrical type are available


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